Get Adhesion Aspects in MEMS/NEMS PDF

By Seong H. Kim, Michael T. Dugger, Kash L. Mittal

ISBN-10: 9004190953

ISBN-13: 9789004190955

Phenomena linked to the adhesion interplay of surfaces were a severe element of micro- and nanosystem improvement and function because the first MicroElectroMechanicalSystems(MEMS) have been fabricated. those phenomena are ubiquitous in nature and are found in all structures, despite the fact that MEMS units are rather delicate to their results as a result of their small measurement and restricted actuation strength which could be Read more...

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22a) (22b) (22c) Note that Fs and Fp calculated with equations (22a) and (22b) will be different from those calculated with equations (19a) and (19b) because the calculation position is changed. But, the changes in Fs are compensated by the changes in Fp and the total capillary force should be balanced along the meniscus surface. In the circular approximation, this compensation cannot be perfect since r1 is fixed along the entire meniscus surface. 2) and negligible compared to typical experimental errors in AFM measurements.

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Adhesion Aspects in MEMS/NEMS by Seong H. Kim, Michael T. Dugger, Kash L. Mittal


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